| | |  | | | | Record from Web of Science® | | | | | | |
| Monolithic microfabricated valves and pumps by multilayer soft lithography |
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| Author(s): Unger MA, Chou HP, Thorsen T, Scherer A, Quake SR |
| Source: SCIENCE Volume: 288 Issue: 5463 Pages: 113-116 Published: APR 7 2000 |
| Times Cited: 940 References: 35 |
| Abstract: Soft Lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft Lithography. paradigm. multilayer soft lithography, with which devices consisting of multiple Layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft Lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained. |
| Document Type: Article |
| Language: English |
| Reprint Address: Quake, SR (reprint author), CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA |
Addresses:
1. CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA |
| Publisher: AMER ASSOC ADVANCEMENT SCIENCE, 1200 NEW YORK AVE, NW, WASHINGTON, DC 20005 USA |
| Subject Category: Multidisciplinary Sciences |
| IDS Number: 302VT |
| ISSN: 0036-8075 |
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| | | | | | | | | Record from Web of Science® | | | | | | | | | |